討論了應(yīng)用于引信中的高g微陣列式加速度傳感器的設(shè)計(jì)理論、布陣方法和微加工工藝。討論過(guò)程中，針對(duì)測(cè)量不同的加速度值，利用了不同的設(shè)計(jì)方法和加工工藝及二維傳感陣列的布陣設(shè)計(jì)上的特點(diǎn)，將微加工中三維加工工藝與平面加工工藝相結(jié)合，利用體加工技術(shù)和高深寬比刻蝕技術(shù)，研制出了微陣列加速度傳感器的樣品。經(jīng)測(cè)試表明符合使用要求，其結(jié)果為實(shí)用化奠定了基礎(chǔ)。
關(guān) 鍵 詞 微傳感器; 陣列式; 加速度; 微加工技術(shù)

Abstract In this paper the method of the design and the manufacture for the high g micro sensor array of the acceleration for the use of the fuse system are presented systematically, synthetically. It is applied the different method of the design and the technique for measuring the different value of the acceleration, and had the different sensor array in the manufacture of the micro sensor array of the acceleration. It is used the 3-D technique union of the 2-D technique of the integrated circuit. This sample meet the demand which is based upon this paper for the application.
Key words micro sensor; array; acceleration; micro machining technology

Manufacture of Micro Sensor of Acceleration in Fuse System