提出了一種新型的基于線陣CCD 的全息光柵位移傳感器,該系統(tǒng)利用線陣CCD 分辨率高、像素均勻等特點(diǎn),對(duì)干涉條紋的移動(dòng)進(jìn)行精確定位,全息光柵在測(cè)量過(guò)程中具有不受光源波長(zhǎng)的影響、適用光譜范圍寬等特點(diǎn),實(shí)現(xiàn)了位移的自動(dòng)精確測(cè)量。給出了系統(tǒng)誤差分析及結(jié)果數(shù)據(jù),經(jīng)實(shí)驗(yàn),系統(tǒng)穩(wěn)定可靠,精度高。
關(guān)鍵詞: 線陣CCD ; 全息光柵; 位移傳感器
Abstract : A kind of new holographic grating displacement sensor based on the linear CCD is made. This system carry out accurate location to interference stripe movement using high resolution capacity and resembles plain in color characteristic of CCD. Holographic grating do not receive influence of the wavelength of light source in measuring course , suitable spectrum scope wide. The auto2accurate measurement of displacement was realized. The system error analysis and result data is given. The system is steady and reliable by experiment .
Key words : linear CCD ; holographic grating ; displacement sensor