自從Clark 和Lyons 在1962 年研制出第一個(gè)生物傳感器以來(lái),探測(cè)各種生物和化學(xué)分子的生化傳感器相 繼問(wèn)世. 這類傳感器的基本原理是通過(guò)生化敏感層,被分析分子在敏感層上的物理或化學(xué)吸附被換能器轉(zhuǎn)化為電 信號(hào). 在眾多的設(shè)計(jì)中,將活潑的生化敏感材料涂鍍?cè)诠杵骷砻媸且粋€(gè)最有新意的設(shè)想. 以往的硅生化傳感器多 設(shè)計(jì)為膜片式,器件的靈敏度受到限制. 硅微機(jī)械懸臂梁是一種靈敏度極高的器件,近年來(lái)在傳感器領(lǐng)域受到關(guān) 注. 文章總結(jié)了目前世界上硅基微懸臂梁生化傳感器的最新發(fā)展動(dòng)態(tài). 對(duì)幾種硅懸臂梁的設(shè)計(jì)方法和工作原理進(jìn) 行了討論,并給出了幾種新型微生化氣體和液體傳感器檢測(cè)不同有機(jī)分子和生物分子的結(jié)果.
關(guān)鍵詞　　懸臂梁,敏感層,靈敏度,噪聲
Abstract 　　Since the development of the glucose sensor by Clark and Lyons in 1962 , generally recognized as the first biosensor , many types of sensors have been developed in which the physical or chemical transducer is provided with a layer containing a biological sensing element . The resulting device is called a biosensor , aimed to produce an electronic signal as a function of the concentration of chemical or biochemical constituent . Among many proposed con2 cepts , the integration of biologically active materials with a silicon chip is one of the most intriguing approaches. The silicon chips are usually designed as membranes , which have limited sensitivity. The microcantilever is an extremely sensitive device , which has attracted much attention during recent years. In this paper , the newest development of cantilever2based biosensors are summarized. The design and principle of microcantilevers together with examples of a few newly developed bio2sensors are discussed.
Key words 　　cantilever , sensitive layer , sensitivity , noise