采用新型的功能材料——超磁致伸縮材料作為微位移器件, 研制了一種具有位移感知功能的超磁致伸縮微位移執行器, 并建立了其微位移閉環控制系統. 提出了一種高分辨率、無摩擦、傳感?位移傳遞一體化的圓形膜片式柔性結構, 作為超磁致伸縮微位移執行器的微位移傳遞和感知機構. 應用薄板彎曲理論得出了相應的撓度、應變變化率的解析表達式及分布曲線, 確定了微位移感知傳感器的分布形式, 實現了執行器的微位移感知功能. 同時,
對研制的具有位移感知功能的超磁致伸縮微位移執行器及其微位移閉環控制系統進行實驗研究, 結果表明: 執行器的微位移感知靈敏度和系統的微位移閉環控制精度較高.
關鍵詞: 超磁致伸縮; 微位移執行器; 感知; 柔性結構
Abstract: A giant magneto st rict ive m icrodisp lacement actuato r w h ich has the funct ion of sensing it s disp lacement and w h ich uses a new type of funct ionalmaterials (giant magneto st rict ive materi2 als) as it s m icrodisp lacement device has been developed. A m icrodisp lacement clo sed loop cont ro l system is also built. A k ind of circular membrane f lexible st ructure w ith h igh dist inguishability, zero f rict ion, and integrated sensing2t ransferring2disp lacement capability, is p ropo sed to be used as a mechanism to t ransfer and sense the actuato r’sm icrodisp lacement. The analysis fo rmulas and the dist ribut ion curves of def lect ion and variance rat io of st rain are obtained by using circular p late bending theo ry. O n basis of th is, the dist ribut ion of the senso rs that sense the actuato r’s disp lace2 ment is obtained, and the actuato r’s disp lacement2sensing funct ion is realized. A t the same t ime,
experimental studies on the actuato r and it sm icrodisp lacement clo sed loop cont ro l system are car2 ried out. The result s show that the sensit ivity of the actuato r and the p recision of the system’s clo sed loop cont ro l are imp roved.
Key words: giant magneto st rict ion; m icrodisp lacement actuato r; sensing; f lexible st ructure